Fig. 1. SEM images of the fabrication procedure of a W–C-SQUID by FIBID. (a) First the leads connecting the SQUID to the Au leads are deposited. (b) Secondly, two rectangular shapes are deposited. (c) In the third step, the halo residing in the inner loop area is removed by a short step of FIB milling. (d) In the last step, narrow (50 nm wide) nanobridges are grown.
