Table 3.
Axial precision of the 4.5 m MRF polishing machine
| Axis # | X | Y | Z | A (rX) |
|---|---|---|---|---|
| Unit | μm | μm | μm | arcsec |
| Positioning accuracy | 9.3 | 11.6 | 3.2 | 3.7 |
| Repeatability | 7.4 | 9.4 | 2.4 | 3.2 |
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