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. 2022 Oct 8;12(10):840. doi: 10.3390/bios12100840

Figure 13.

Figure 13

Reported silicon photonic resonator sensors performance comparison in terms of quality factor, Sb, and iLoD. All sensors operate in the C-band unless marked otherwise. For works that reported sensor performance data for multiple sensor geometries, the best-performing design has been included in this plot. The sensors include quasi-transverse electric (TE) strip MRR [21], quasi-transverse magnetic (TM) strip MRR [21], TE strip MRR (O-band) [21], TM strip MRR (O-band) [21], SWG MRR [19,21,29,39], fishbone SWG resonator [1], TM SWG racetrack resonator (RTR) [51,52], trapezoidal pillar SWG MRR [53], substrate overetch (SOE) SWG MRR [6], single-slot SWG RTR [54], single-slot SWG MRR [55], double-slot SWG RTR [54], double-slot SWG MRR [55], multibox SWG MRR [3], and the best-performing C-band and O-band boneless (C6 and O4) and fishbone (C1 and O2) SWG MRRs reported in this work (C6 achieved Sb,ave = 401 nm/RIU, Q = 5.2 × 103, and iLoD = 7.5 × 10−4 RIU; O4 achieved Sb,ave = 374 nm/RIU, Q = 7.8 × 103, and iLoD = 4.5 × 10−4 RIU; C1 achieved Sb,ave = 402 nm/RIU, Q = 5.5 × 103, and iLoD = 7.1 × 10−4 RIU; O2 achieved Sb,ave = 337 nm/RIU, Q = 7.6 × 103, and iLoD = 5.1 × 10−4 RIU). Curves of constant iLoD are included on the plot for sensors with resonance wavelengths of 1310 and 1550 nm. Legend entries marked with a section sign (§) indicate sensors for which the reported Q and Sb were obtained from simulations performed with gaseous cladding material (these markers are depicted in grayscale). Values reported for all other sensors are based on experimental measurements in water cladding.