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Experiment diagram of macro/micro dual-drive system. (a) Picture of macro/micro dual-drive rotary system: 1, rotation workbench; 2, micro-drive system; 3, macro-drive system. (b) Experimental program of system: 1, computer; 2, control system of PMAC; 3, macro/micro dual-drive precision rotary system; 4, calibration axis; 5, experimental box; 6, reflex mirror; 7, interference mirror; 8, laser (Renishaw’s dual-frequency laser interferometer ML10); 9, vibration isolation.
