Table 3.
Element | Species | Binding Energy (eV) | CC-0 | CC-3 | CC-6 | CC-12 |
---|---|---|---|---|---|---|
C 1s | C-H/C-C | 284.6 | 55.17 | 44.44 | 71.05 | 67.79 |
C-N/C-O/C-Si | 286.0 | 11.23 | 11.66 | 0.66 | 1.48 | |
C=O | 286.9 | 4.26 | 11.68 | 1.59 | 1.03 | |
O=C-O | 288.7 | 4.86 | 10.07 | 0.65 | - | |
COOH/COOR | 291.5 | - | 6.24 | - | 0.14 | |
Si 2p | SiOx | 101.3 | - | 6.98 | 12.57 | 15.92 |
SiOx | 102.2 | 0.95 | - | - | - | |
SiO2/SiO2(CH3)3 | 103.2 | - | - | - | - |