Table 2.

Parametric comparison of the reported THz metamaterials or metasurfaces.

Microstructure	S (THz/RIU)	FOM (RIU${}^{-1}$)	Q	Ref.
Present work	1.21	2.75	2.43
MEMS-based metamaterial	0.379	63.83	66.01	[66]
All-polymeric THz sensor	3.34	8857	23,670	[67]
GMA based sensor	2.372	64.62	179.95	[68]
Split-ring resonator with four-gaps	0.285	1.88	6.6	[69]
Electric split-ring metamaterial	0.457	35.47	40.65	[70]
Black phosphorus-based nanostructure	1.06	0.166	∼	[71]
3D graphene metastructure	0.96	∼	∼	[72]