Table 2.

The same as Table 1 for the 2 × 2 µm² region of Figure 5.

	25th	50th	75th
hmax [nm]	11.8	14.9	17.9
0 < ηel < 1	0.331	0.488	0.663
E, Hertz [GPa]	2.36	3.04	3.88
E, Oliver–Pharr [GPa]	4.03	4.99	6.43