Involved advantages and disadvantages of the deposition techniques.

Techniques	Merits	Demerits
CBD	Simple and cost effective	Precipitation occurs in the bath causing serious problems
	Stoichiometric deposition66	Materials are lost70
	Low fabrication temperature	Films are badly cohered onto the substrate
	Capability of depositing large area films (∼10 cm2)67	Produces powdery films
	Various types of substrates are used68	Failed to control film thickness
	Tuning film qualities by controlling growth parameters	Deposited films are contaminated though organic additives
	Deposition of ternary and quaternary compounds69	Opposite ions present in the reaction bath
SILAR	Facile and economical	Perfect adsorption of ions requires on the substrate surface
	Potentiality to grow large-surface films (∼10 cm2)71	Substrate surface must be balanced completely through precursor solution73
	Reproducibility
	Any kind of substrate can be used
	No need to use sophisticated instrument or vacuum pump
	No precipitation occurs in the bath
	Synthesis of doped, ternary, and quaternary compounds
	Does not need premium quality target
	Controlling on film thickness
	Avoid unnecessary heating
	Minimization of dislocation density by controlling deposition parameters72
	Fabricated stable and sticky films36
ALD	Films thicknesses are under controlled	Sluggish deposition process
	Layer by layer film deposition	Highly refined substrate is required
	Deposition can be performed at relatively low temperature	Instrument and substrate are highly priced
	Soft substrates can be used	Several trials required to set optimize film growth condition
	Ability to use thermally unstable precursors due to slow degradation74,75	Process is restricted to non-volatile compounds
		Unfavorable for heat sensitive biological substrates76,77
Spin coating	Dominated over film thicknesses	Hindered to use multiple substrates at a time
	Easy and effortless	Restricted to utilize big substrate
	Affordable	Low material productivity
	Fabricated stable cohered films	Inexpensive with respect to photoresist and substrate size
	Deficit of coupled variables	95–98% materials are wasted80
	Reproducibility78,79	Less effective in nanotechnology due to quick drying81
Solvothermal	Dominate over crystallinity of the deposited films	Requirement of expensive autoclave
	Produces intermediate to specific quality films	Safety issues
	Potentiality to synthesize solid-state materials	Impossible to observe in situ reaction process82
		Less dominance over particle size83