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. 2022 Oct 12;611(7936):461–466. doi: 10.1038/s41586-022-05127-9

Extended Data Fig. 6. Illustration of device configuration for both S1 and S2.

Extended Data Fig. 6

While S1 is completely suspended by the membrane springs, S2 is attached to the Si-substrate frame on one side and membrane springs on the other side.