Table 3. End Point Tracking Error Comparison Study.
| end point tracking error | ||||||
|---|---|---|---|---|---|---|
| case
study 1 |
case
study 2 |
|||||
| batch number | heuristic-based approach | batch-to-batch ILC | proposed approach | heuristic-based approach | batch-to-batch ILC | proposed approach |
| batch 1 | 0.0456 | 0.0456 | 0.0456 | 0.0602 | 0.0602 | 0.0602 |
| batch 2 | 0.0422 | 0.0374 | 0.0375 | 0.0570 | 0.0477 | 0.0526 |
| batch 3 | 0.0409 | 0.0299 | 0.0262 | 0.0540 | 0.0356 | 0.0408 |
| batch 4 | 0.0358 | 0.0228 | 0.0136 | 0.0510 | 0.0353 | 0.0301 |
| batch 5 | 0.03288 | 0.0163 | 0.0482 | 0.0334 | 0.02 | |
| batch 6 | 0.0299 | 0.0101 | 0.0454 | 0.029 | 0.0146 | |
| batch 7 | 0.027 | 0.0427 | 0.0233 | |||
| batch 8 | 0.0242 | 0.0401 | 0.0233 | |||
| batch 9 | 0.0215 | 0.0375 | 0.0134 | |||
| batch 10 | 0.0189 | 0.0350 | ||||
| batch 11 | 0.0163 | 0.0326 | ||||
| batch 12 | 0.0138 | 0.0302 | ||||
| batch 13 | 0.0279 | |||||
| batch 14 | 0.0257 | |||||
| batch 15 | 0.0235 | |||||
| batch 16 | 0.0214 | |||||
| batch 17 | 0.0193 | |||||
| batch 18 | 0.0173 | |||||
| batch 19 | 0.0154 | |||||
| batch 20 | 0.0135 | |||||