Table 1. Comparative Description of Various Reported Conventional Micropump Systems Based on Their Actuation Principles, Fabrication Methods, and Cost Concerns.

	valves	fabrication method	fabrication cost	power source
thermopneumatic micropump	present	micromachining and MEMS fabrication	moderate	10–15 V DC (high current rating)
piezoelectric micropump	present	micromachining and piezoelectric material	high	5–10 V (DC–AC conversion)
electromagnetic micropump	present	micromachining and MEMS fabrication	moderate	5–10 V DC
peristaltic micropump	absent	micromachining, piezoelectric, electromagnetic, pneumatic, and so forth	high	it depends upon the fabrication level
impedance micropump (proposed)	absent	normal fabrication	low	1–3 V DC