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. 2022 Oct 30;9:101898. doi: 10.1016/j.mex.2022.101898

Fig. 5.

Fig 5

Schematic of PDBC fabrication process flow B primarily for evaporable dielectrics: (a) process B1 for etchable dielectrics and no support for BCL etch; and (b) process B2 for any dielectrics that supports BCL etch.