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| polytype | conducting type | miscut toward the primary flat [1–100] (deg) | miscut toward the secondary flat [11–20] (deg) |
|---|---|---|---|
| 6H-SiC (0001) | semi-insulating | –0.1 | –0.03 |
| 6H-SiC (0001) | semi-insulating | –0.03 | 0.00 |
| 4H-SiC (0001) | semi-insulating | +0.04 | 0.00 |
