Figure 4.

Arrays of microparticles made by LIFT of high CoCrFeNiMo${}_{0.2}$ and Au transferred onto Si wafer at pulse energies $E_p=344$ nJ or 5.6 J/cm${}^2$ (on sample) for HEA and 816 nJ or 14 J/cm${}^2$ for Au under $NA=0.26$ focusing. Laser irradiation: 230 fs, 515 nm. Thickness of HEA and Au was 50 nm.