Table 1.

Chemical groups and their respective energies in the Si 2p signal. The references are also indicated.

Assignment	Binding Energy [ev]	References
Si-Si	~99.0–100.0	[25,26]
Si-C	100.3	[27]
SiOx	depends on x	[28]
SiO2	103.7	[29]
Si-O-C	101.3	[30]
O-Si-F	105.0–106.0	[22]