Figure 1.

(a) LithoTag fiducial marker design with central spine and radial dots encoding x- and y-positional coordinates, and encoding checksums for error detection. (b) Example LithoTag fiducial marker pattern. (c) Demonstration of LithoTag detection over a large area. (d) Example of LithoTag fiducial marker as-fabricated with evaporated Ti/Au on a Si/SiO₂ substrate. (e) Demonstration of LithoTag detection within an arbitrary image from a large map. (f) Demonstration of map image stitching, with red annotations corresponding to LithoTags and yellow to automatically identified nanowires.