Fig. 3. Fabrication and experimental verification of higher-order BICs.
Schematic illustration of the two fabrication steps: (A) 3D laser nanoprinting in a dip-in configuration and (B) four-angle gold sputtering. (C) Scanning electron microscopy images of a PNM with Λ = h = 3.5 μm, d = 0.7 μm, and α = 12° in the top row and side-view images for α = 4°, 12°, and 22° in the bottom row (the size parameters defining the PNM structure are given in fig. S1). (D) Comparison of measured (colored) and simulated (gray) PNM spectra of BIC1 from symmetric (α = 0°) to highly asymmetric (α = 26°) structures. The inset shows corresponding amplitudes and Q-factors. (E) Ultrawide-scaled BIC1 spectra from the near-infrared (1.8 μm) to the MIR (10 μm) wavelength region.
