Table 1.

NbN film’s properties. Starting from the left, columns are: film acronym (SC: Al${}_2$O${}_3$ c-cut; SR: Al${}_2$O${}_3$ r-cut; MO: MgO; SO: SiO${}_2$; the number following the two letters refers to the film thickness in nm units); resistivity value at 15 K; superconducting transition temperature; superconducting transition width; superconducting critical-current density at 0 K.

Sample	$\mathsf{\rho }$ ($\mathsf{\Omega }$ cm)	${\mathit{T}}_{\mathit{c}}$ (K)	$\mathsf{\Delta }{\mathit{T}}_{\mathit{c}}$ (K)	${\mathit{J}}_{\mathit{c}0}$ (MA/cm${}^2$)
MO5a *	8.0 × ${10}^{-5}$	10.072	0.08	0.40 ± 0.014
MO5b **	5.8 × ${10}^{-4}$	11.02	0.79	2.24 ± 0.013
MO10	1.2 × ${10}^{-4}$	13.29	0.27	9.98 ± 0.15
MO15	2.4 × ${10}^{-4}$	13.83	0.23	11.40 ± 0.016
SC5	8.0 × ${10}^{-5}$	10.64	0.43	0.90 ± 0.010
SC10	2.4 × ${10}^{-4}$	13.50	0.40	10 ± 0.028
SC15	1.7 × ${10}^{-4}$	12.73	0.24	5.29 ± 0.08
SR5 **	1.1 × ${10}^{-4}$	11.76	0.68	0.63 ± 0.013
SR10	1.7 × ${10}^{-4}$	12.43	0.30	8.3 ± 0.18
SR15	2.3 × ${10}^{-4}$	12.58	0.38	6.14 ± 0.13
SO5	9.3 × ${10}^{-7}$	9.40	0.46	0.89 ± 0.024

* Both MO5a and MO5b belonged to the same deposition run, but the fabrication process of their Hall bar was carried out by using slightly different parameters. ** The Hall bar width of this film was 10 µm.