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. 2022 Nov 25;22(23):9151. doi: 10.3390/s22239151

Table 1.

Commonly used piezoelectric materials in PMUTs and their properties.

Property Units PZT [26] AlN [38] ZnO [39]
Density Kg/cm3 7500 3260 5680
Young’s Modulus GPa 127 410 209
Piezoelectric Coefficient e31 C/m2 −8 to −12 −1.05 −1.0
Converse Piezoelectric Coefficient d33 pm/V 60–130 3.9 5.9