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. 2022 Dec 15;2(1):12. doi: 10.1007/s43939-022-00033-3

Table 4.

Main materials used for microfluidic chip fabrication

Materials/features Silicon/glass Polymers Paper
Elastomers Thermosets Thermoplastics Hydrogels
Examples PDMS SU-8 PMMA, polystyrene
Microfabrication techniquea Wet and dry etching Casting Photolithography Thermomoulding Photolitography, printing
Resolution limit  < 100 nm  < 1 μm  < 100 nm  ~ 100 nm  ~ 10 μm  ~ 200 μm
Mechanical stability Very high Low High Medium Low Very low
Chemical stability Very high Low High Low Low Low
Solvent compatibility Very high Low High Medium to high Low Medium
Thermostability Very high Medium High Medium to high Low Medium
Hydrophobicity Hydrophilic Hydrophobic Hydrophobic Hydrophobic Hydrophilic Amphiphilic
Optical transparency No/High High High Medium to high Medium to low low
Oxygen permeabilityb  < 0.01 ∼500 0.03–1 0.05–5  > 1  > 1
Scalability Medium Lowc Low High N/A High
Cost High Medium Medium to high Medium to low low Low
Main advantages Excellent chemical, mechanical and thermal resistance High thermal-conductivity Once the high-resolution mould is made, multiple devices can be fabricated outside the clean room Low cost
Rubber-like elasticity (useful to form pumps and valves Low investment cost High aspect ratio features High optical transparency Low cost in mass production
Main disadvantages

Expensive

Laborious and time-consuming fabrication

Low melting point

Tendency to adsorb reagents

Sample evaporation Low sensitivity
Only suitable for research prototyping High cost High investment cost Insufficient gas permeability
Applicability

Capillary electrophoresis;

Analytical and micro-reaction devices

Cell-based studies;

Clinical and veterinary diagnostics and POC devices or ‘organs-on-chips’ devices

Platforms requiring high chemical/thermal stability; Moulds for elastomers Mass-scale production of conventional microfluidic devices Colorimetric analysis; Mass-scale production

aphotosensitive glass can be considered as thermoset

bOxygen permeability is beneficial to long-term living cells studies, but the loss of water may lead to a shift in pH and disturb the chemical analysis

cOnly suitable for research prototyping because is difficult to scale up (cost per unit does not decrease) [204]