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. 2022 Apr 12;15(1):9. doi: 10.1007/s12200-022-00012-9

Fig. 5.

Fig. 5

A low-loss TOPS with a directly integrated silicon heater [51]. a Optical micrograph of the structure. b Perspective view of the structure. c Doping profile along the cross-section marked red in (b), overlapped with the simulated amplitude of the horizontal component of the electrical field