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. 2022 Dec 21;13:7848. doi: 10.1038/s41467-022-34197-6

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© The Author(s) 2022

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 5 — a Transmission and phase delay from 2D periodic arrays of Si₃N₄ nanorods with heights of h = 230 nm and lattice constant a = 360 nm. The inset shows the structure of a single cell. The error bars show a reference of $\pm 0.02 π$ phase difference with respect to the measured phase. b SEM image of different area of the fabricated metasurface. c Simulated NLM phase contrast image. d Measured NLM phase contrast image. Scale bar corresponds to 20 µm.