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(a) Microscopic image of MEMS pressure sensor. Inset: 3D image of a diaphragm with interference patterns (Newton rings), indicating complete sealing. Reprinted/adapted with permission from Ref. [66]. Copyright 2015, IEEE. (b) A 3D printed robotic hand with actuation mechanisms. Small capacitive MEMS pressure sensors shown in (a) are ideal for the fingertips of the hand. Reprinted/adapted with permission from Ref. [67]. Copyright 2019, SAGE Publishing.
