Figure 5.
(a) The O 1s XPS spectra for a-IGZO films deposited at different oxygen pressures. Gaussian fitting of O 1s spectra for a-IGZO films deposited at pressures of (b) 0.1 Pa, (c) 0.5 Pa, (d) 1 Pa, (e) 5 Pa, and (f) 10 Pa, respectively.
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