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Summary of the performances of μ, Vth, SS, and Ion/Ioff, in TFTs with a-IGZO thin films deposited at different oxygen pressures.
| Oxygen Pressure (Pa) |
μ (cm2/V·s) |
Vth (V) |
SS (mV/Decade) |
Ion/Ioff |
|---|---|---|---|---|
| 0.1 | 6.15 | 3.77 | 580.38 | 1.2 × 106 |
| 0.5 | 17.19 | 5.3 | 403.23 | 1.7 × 106 |
| 1 | 17.07 | 5.4 | 469.39 | 3.0 × 106 |
| 5 | 8.12 | 10.6 | 487.80 | 1.0 × 107 |
| 10 | 3.31 | 12.6 | 685.73 | 1.1 × 106 |
