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| Lamella thickness (defined as “Pattern Offset”) (µm) | Front Width Overlap (µm) | Rear Width Overlap (µm) | Milling Current (nA) | Pattern Type | DCM Rescan Interval (s) | |
| Rough Milling | 1.0 | 1.5 | 1.0 | 1.0 | Rectangle | 120 |
| Medium Milling | 0.8 | 0.65 | 0.5 | 1.0 | CCS | 90 |
| Fine Milling | 0.6 | 0.35 | 0.1 | 0.5 | CCS | 60 |
| Finer Milling | 0.4 | 0.05 | 0.05 | 0.3 | CCS | 30 |
| Polishing 1 | 0.15 | N/A | N/A | 0.03 | CCS | 30 |
| Polishing 2 | 0 | N/A | N/A | 0.01 | CCS | 10 |
