. 2022 Dec 14;4(12):6357–6363. doi: 10.1021/acsaelm.2c01483

Table 1. ALD Pulse Scheme of Hf–Zr for Different x Values in Hf_1–xZr_xO₂ Compositions.

x	Hf pulses	Zr pulses	no. of repetitions
0.5	1	1	50
0.66	1	2	33^a
0.8	1	4	20
1	0	1	100

Plus one additional Hf pulse.

Table 1. ALD Pulse Scheme of Hf–Zr for Different x Values in Hf1–xZrxO2 Compositions.