Fig. 5.

Development of silicon photonics-based LiDAR. The first silicon photonics-based OPA. Adapted with permission from [108], copyright 2009, OPG. A large-scale two-dimensional OPA with complex far-field patterns. Adapted with permission from [109], copyright 2013, NPG. III-V/ silicon beam scanner with lasers. Adapted with permission from [111], copyright 2015, OPG. Monolithic 2D OPA with independent integrated electric control. Adapted with permission from [112], copyright 2015, OPG. High-resolution OPA based on non-uniform waveguide arrays. Adapted with permission from [113], copyright 2016, OPG. Extremely low static power consumption OPA system based on III-V/silicon phase shifter arrays. Adapted with permission from [114], copyright 2019, OPG. The first packaged coherent OPA-based LiDAR on a silicon photonic platform. Adapted with permission from [115], copyright 2019, IEEE. Mobile Eye’s integrated FMCW LiDAR. Image credit: Intel [116]. The first large-scale OPA-based silicon photonic LiDAR with on-chip array calibration capability. Adapted with permission from [117], copyright 2021, IEEE