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Parameters used in the simulation model.
| Parameter | Value |
|---|---|
| Retaining ring inner diameter d2 | 301 mm |
| Retaining ring outer diameter d1 | 348 mm |
| Retaining ring speed | 120 rpm·min−1 |
| Pad rotation speed | 120 rpm·min−1 |
| Abrasive quantity N | 30,000 |
| Abrasive diameter dp | 50 nm |
| Abrasive density ρp | 2300 kg·m−3 |
| Slurry density | 1150 kg·m−3 |
| Polishing slurry viscosity µ | 0.02 pa·s |
| Pad diameter D | 850 mm |
| Polishing pad center position coordinates | (0,0) |
| Retaining ring center position coordinates | (0,180 mm) |
