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. 2022 Oct 24;17(1):59–64. doi: 10.1038/s41566-022-01088-7

Extended Data Fig. 7. Calibration of the piezo stage.

Extended Data Fig. 7

The piezo stage was calibrated with the spectrometer presented in this paper. A laser with a wavelength of 1550 nm was coupled into the spectrometer and the photo signal of the stationary wave was recorded over 100 μm mirror displacement (piezo travel range). A fast Fourier transformation resulted in a slight offset from the expected value giving rise to a calibration value of 0.9764. Therefore, the real piezo stage travel distance was 97.64 μm.

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