Table 1.
Comparison of specifications and prices of typical commercially available displacement sensors.
Category | Range (mm) |
Accuracy (μm) |
Resolution (μm) |
Dealer Price in USD a (Brand/Manufacturer) |
---|---|---|---|---|
Capacitive sensor | 0.05 | 0.15 | 0.001 | $2000 (με) b |
Eddy current sensor | 1 | 1 | 0.1 | $2100 (Kaman) c |
Inductive sensor (LVDT) | 1 | 6 | -- i | $650 (με) d |
Laser triangulation | 10 | 12 | 1 | $1300 (με) e |
Digital contact displacement sensor | 12 | 1 | 0.1 | $1600 (Keyence) f |
Color confocal laser displacement sensor | 7 | 0.94 | 0.25 | >$8000 (Keyence) g |
Hall sensor | 0.25–2.5 | 0.1~1% of full scale | 5 | $5 h |
a From quotations by dealers. b Micro Epsilon product specifications [1]. c Kaman product specifications [2]. d Micro Epsilon product specifications [3]. e Micro Epsilon product specifications [4]. f Typical model GT2-PK12A [5]. g Typical model CL-L030 [6]. h General specification, see Chap. 3 of [7]. i Depending on amplifying electronics.