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Fabrication of SiONP overlays (a) A schematic diagram to illustrate the fabrication process for PECVD amorphous silicon oxynitrophosphide (SiONP) overlays with Si wafer substrate. (b) SEM micrograph shows the surface topography of a representative sample after photolithography, etching and PECVD deposition of SiONP (feature size 2 μm).
