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. 2023 Jan 16;9:11. doi: 10.1038/s41378-022-00480-1

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© The Author(s) 2023

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — The green dots show the simulated quality factors based on gas damping. The solid green line is a linear fit of the simulated quality factors over frequency and indicates the trend of the gas damping quality factors. The blue dots show the measured quality factors. The inset shows a magnified plot up to 200 kHz.