Fig. 7. Quality factors for several out-of-plane modes of design A plotted over the eigenfrequencies of the modes at 1 mbar and 25 ∘C.
The green dots show the simulated quality factors based on gas damping. The red dots show the simulated quality factors based on TED, i.e., Eq. (16). The black dots show the resulting quality factors based on the gas damping and TED simulations. The blue dots show the measured quality factors. The solid lines indicate the trends of the data. The solid green line is a linear fit of the simulated gas damping quality factors over eigenfrequency. The solid red line was obtained as the median of the TED quality factors. The solid black line is the resulting quality factor due to the solid green and red lines. The solid blue line is equal to the solid black line with an additional constant Qanchor = 75,000 included. The inset shows a magnified plot until 200 kHz without trend lines.