Table 4.
Summary of studies of PMUTs for ultrasound imaging applications.
| Reference | Piezoelectric Material | Diaphragm Structure | Center Frequency |
Element Size | Array Size |
|---|---|---|---|---|---|
| Yang et al. [125] |
PZT | Square | ~1 MHz | 200 µm × 200 µm | 6 × 6 |
| Dausch et al. [127] | PZT | Rectangular | 5 MHz | 110 µm × 80 µm | 256 (64 × 4) 512 (32 × 16) |
| Wang et al. [49] | PZT | Rectangular | 1.24 MHz | 1550 µm × 250 µm | Single element |
| Liu et al. [130] |
PZT | Circular | 0.77 MHz 2.30 MHz |
Diameter 410 µm Diameter 230 µm |
2 × 12 Area 12 mm × 6 mm |
| Wang et al. [128] | PZT | Circular | 15 MHz | Diameter 32 µm | 16 × 8 |
| Lu et al. [129] |
AlN | Circular | 20 MHz | Diameter 70 µm | 8 × 24 |
| Qu et al. [131] |
AlN | Circular | 5 MHz | Diameter 100 µm | 23 × 26 |
| Chen et al. [113] |
PMN-PT | Square | 27 MHz | 50 µm × 50 µm | 2 × 2 4 × 4 |
| Savoia et al. [132] | PZT | Circular | 2.5 MHz | None | 64 elements, each element contains 184 cells |
| Ledesma et al. [133] | AlN | Square | 2.4 MHz | 80 µm × 80 µm | None |