Table 6.

Summary of studies of PMUTs for therapeutic applications.

Reference	Piezoelectric Material	Diaphragm Structure	Center Frequency	Element Size	Array Size
Akhbari et al. [15]	AlN	Circular	250 kHz	Diameter 115 µm	60 × 60
Lee et al. [140]	PZT	Circular	<1 MHz	Diameter 700–1200 µm	16 elements
Basaeri et al. [141]	PZT	Square	140 kHz	None	None
Pop et al. [142]	AlN	Circular	2 MHz	None	5 × 10
Pop et al. [144]	AlN	Circular	None	None	10 × 10
Narvaez et al. [143]	PZT	Circular	2.8 MHz	Diameter 107 µm	7 × 7