Table 2.
Type of Feature | Symbol | Dimensions (µm) |
---|---|---|
Hexagonal Vertical Length (HV) | HV1-13 | 1600 |
Hexagonal Horizontal Length (HH) | HH1-13 | 1390 |
Circular Diameter (C) | C1-9 | 100, 200, 300, 500, 700, 900, 1100, 1300, and 1500 |
Square Vertical Length (SV) and Square Horizontal Length (SH) | SV1-3 and SH1-3 | 1000, 1500, and 2000 |
Square Dimensions | SQ1-2 | 1500 and 700 |