Table 2.
Pattern # | Pattern (D/Sr/H) (nm) Pillar shape | Pillar height (nm) | Distance in row (Sr) (nm ) | Distance in diagonal (Sd,) (nm) | Pillar top surface area (μm2) | Surface area fraction (%) |
---|---|---|---|---|---|---|
| ||||||
1 | 500/300/500 Square | 467.7 ±10.2 | 319.5 ±21.7 | 576.5 ±17.2 | 0.243 ±0.018 | 36.6 |
2 | 700/700/300 Square | 307.6 ±13.2 | 622.5 ±21.7 | 1012.7 ±25.9 | 0.478 ±0.045 | 29.1 |
3 | 500/500/600 Square | 565.8 ±21.1 | 481.6 ±23.5 | 799.6 ±32.5 | 0.291 ±0.029 | 28.9 |
4 | 400/400/600 Round | 585.6 ±18.5 | 374.7 ±20.5 | 677.2 ±20.4 | 0.155 ±0.010 | 24.8 |
5 | 500/500/600 Round | 601.8 ±9.8 | 453.8 ±22.2 | 850.6 ±37.2 | 0.279 ±0.030 | 26.7 |
Smooth | -- | -- | -- | -- | 100.0 |
Note: Surface area fraction is the ratio of total pillar top surface area and total 2-D projected surface area including both the pillar top surface and bottom surface between pillars, but not the pillar sidewalls.