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. 2023 Jan 16;20(2):268–275. doi: 10.1038/s41592-022-01749-z

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© The Author(s) 2023

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a, Schematic diagram of the CLIEM system. α, Stage tilting angle during FIB milling; β, milling angle between the FIB and the sample plane; P1–P3, sample loading position (P1); LM imaging position (P2) and FIB–SEM position (P3). Abbreviations: objective (OBJ), piezo-stage (PZT), mirror (M), tube lens (TL), scanning lens (SL), galvo scanner (GS), collimating lens (CL), dichroic mirror (DM), pinhole (PH), single-mode (SM) fiber, multimode (MM) fiber and emission filter (EM). b, 3D rendering of the CLIEM system, showing the arrangement of the essential components and modules. c, The front view of the boxed area in b, illustrating the sample holder resting at three working positions (P1–P3). SED, secondary electron detector. d, 3D rendering of the sample holder containing three AutoGrid samples. e, The section view of the boxed area in c, displaying the 1 mm working distance (WD) of the confocal imaging module.