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Plasma experimental conditions.
| Voltage (kV) |
Frequency (kHz) |
Total Gas Flow (SLM) |
Gap (mm) |
Treatment Duration (s) |
Duty Cycle (%) | Power (W.cm−2) | Precursor (%) | Precursor Amount (gr.h−1) |
|---|---|---|---|---|---|---|---|---|
| 11 | 5 | 5 | 1 | 180 | 10% 30% 50% |
0.17 0.51 0.91 |
3% 10% 15% |
18 60 91 |
