Figure 2.
Fabrication steps for the resonator: (a) substrate preparation, (b) bottom electrode patterning, (c) piezoelectric deposition, (d) top electrode patterning.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.