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. 2023 Feb 2;23(3):1655. doi: 10.3390/s23031655

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© 2023 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).

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Experiment on the mass sensitivity of the FBAR. (a) Scattering parameter S₂₁ for different PMMA layer thicknesses, (b) $k_{e f f}^{2}$ versus added PMMA mass, and (c) frequency shift versus PMMA mass.