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Process parameters of the polyimide and sacrificial layer.
| PMMA | Polyimide | |
|---|---|---|
| Spin Velocity [RPM] | 1500 | 1500 |
| First Curing Temperature [°C] | 180 | 130 |
| First Curing Time | 0 h:2′0″ | 1 h:0′0″ |
| Second Curing Temperature [°C] | - | 200 |
| Second Curing Time | - | 2h:00′0″ |
