Table 3.

Comparison of flexible FBARs.

	${\mathit{k}}_{\mathit{eff}}^2[\%]$	Fabrication Steps	Membrane	Substrate Material
[22]	3.1	8	Yes	thin-silicon
[26]	3.1	5	No	Polyimide
[25]	5.1	8	Yes	PET
This work	6.0	5	No	Polyimide