Table 1. Summary of CVD-Grown Large-Scale TMDs.

materials	architecturesa	methods	characteristics	applications	ref
MoS2	ML	APCVD	wafer-scale thin film	flexible FETs	(164)
	ML	LPCVD	wafer-scale thin film	FETs, logic inverters	(60)
	ML	APCVD	centimeter-scale thin film, single crystallinity	FETs	(47)
	ML	LPCVD	wafer-scale thin film, single crystallinity	FET array	(55)
	multilayer	MOCVD	thin film on glass	low-power photodetectors	(170)
	ML	MOCVD	wafer-scale thin film		(66)
	ML	MOCVD	centimeter-scale thin film	FETs	(68)
MoS2 or MoSe2	ML	APCVD	millimeter-scale single crystals	FETs	(48)
WS2	ML	MOCVD	wafer-scale thin film, single crystallinity	FETs	(69)
	ML	LPCVD	wafer-scale thin film, single crystallinity		(54)
WSe2	ML or BL	APCVD	millimeter-scale single crystals	FETs	(166)
MoSe2	ML	APCVD	centimeter-scale thin film,		(49)
MoTe2	multilayer	APCVD	centimeter-scale single crystals	FETs	(32,99,167)

^aML, monolayer; BL, bilayer.