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Illustration of the GQD fabrication process using self-assembled Au nanoparticles. (a) Substrate cleaning, (b) graphene transfer to the substrate, (c) deposition of the intermediate SiO2 layer, (d) deposition of the Au thin film, (e) thermal annealing to form Au nanoparticles, (f) SiO2 layer etching by CF4 plasma, (g) graphene etching by O2 plasma, and (h) removal of Au nanoparticles and SiO2 layer.
