Table 1. Process Parameters for Fabricating Au Nanoparticles^a,b.

		annealing condition
	Au film thickness (nm)	temperature (°C)	time (s)	particle diameter (nm)	σ (nm)
condition A	2	500	120	12.2	7.7
condition B	2.5	600	120	14.1	8.5
condition C	3	300	120	16.1	9.2
condition D	5	400	30	5.1	2.86
				27.4	16.0

^aParticle diameter and dispersion are determined by the Gaussian fitting of the Au nanoparticle diameter histogram illustrated in Figure 2e.

^bThe parameter σ denotes the standard deviation.