Table 2. Calculated neff Values for Guided TE and TM Modes and Comparison of the Calculated Thicknesses h of the Waveguide Layer with the Results Obtained from the AFM Measurements at the Corresponding Positions within the Sample.
neff | h (nm) | hAFM (nm) |
---|---|---|
1.56 | 32.0 | 30.4 |
1.59 | 52.7 | 54.8 |
1.62 | 71.0 | 71.1 |