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. 2023 Jan 20;17(3):2399–2410. doi: 10.1021/acsnano.2c09482

Table 2. Calculated neff Values for Guided TE and TM Modes and Comparison of the Calculated Thicknesses h of the Waveguide Layer with the Results Obtained from the AFM Measurements at the Corresponding Positions within the Sample.

neff h (nm) hAFM (nm)
1.56 32.0 30.4
1.59 52.7 54.8
1.62 71.0 71.1