Figure 5.

SEM images of microcantilever based on electrical measurement methods. (A) Microcantilever with comb capacitance detection, driver electrode, and CMOS signal amplification circuit proposed by Forsen et al. in 2005 [70]. (B) In 2007, Lee et al. achieved self-excited dynamic detection of the poly T-sequence DNA and a variety of proteins by using a PZT microcantilever [72]. (C) In 2021, Tian et al., developed a polyimide (PI)/Si/SiO₂ based piezoresistive microcantilever biosensor to achieve a trace level detection for aflatoxin B1 [75].